Tres-Ark’s AutoLytics Slurry Monitor is an automated sampling advanced chemical monitoring system for the semiconductor industry. Using TreLytics spectral analysis, the AutoLytics system will keep customers informed of exact slurry concentration in real time. With automated sampling, accurate inline analysis of the slurry concentration, and quick data feedback, the AutoLytics will prevent scrapping of wafers due to slurry mixes being outside of critical process parameters.

The AutoLytics has serial and TCP/IP communication allowing alarms to be connected through dry contact, fab automation, HSMS, and SECS/GEM. Interfacing with Tres-Ark’s control software and a touch screen Graphic User Interface (GUI), the AutoLytics will provide a complete, real time look into the chemical concentration, temperature and stability of your CMP process. A logging feature allows concentrations and recipes to be saved and analyzed using provided calculation functions.

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  1. Features

    AutoLytics Product Image
    1. Spectral Monitor
    2. Touchscreen GUI with password protected Maintenance Mode
    3. Built-in Logging Software to back up recipes and chemical data
    4. Built-in Data Analyzing Software
    5. Ability to pull off individual samples from the main line without affecting line pressure
    6. USB
    7. HSMS, SECS/GEM, Modbus by customer request
    8. Automatic Sampling & Remote Automation

  1. Chemical Mixes

    Autolytics Tech Drawing
    1. Chemical Mixes: Slurry; Contact for specialty slurry mixes
    2. Dilution Ranges: Dependant on chemical solutions and monitor
      1. %Solid STI – 0.5 - 2.5%
      2. %Solid Cu – 3 - 4.5%
      3. %Peroxide – 1 - 2.5%
    3. Other CMP Slurries under investigation, including customer proprietary mixes

  1. Facility Requirements

    1. Power: 208 to 240 vac single phase, Full Load Current = 2 amps per module
    2. CDA: 60 psi 3/8”
    3. N2: 60 psi, 1/4”
    4. Exhaust: 50 scfm: 4” connection