Controller

Tres-Ark incorporates decades of semiconductor equipment and process expertise to provide component qualified products and platforms. Tres-Ark blending products are turn-key solutions for implementing real-time closed loop control and dispense of multi-variant chemical mixes to meet the exacting demands in advanced semiconductor wafer processes. Tres-Ark can also provide various levels of control packages to accommodate your blending requirements and process needs.


The Complete Solution

The 200 mm and 300 mm production qualified solution is Tres-Ark's complete hardware and software set, including patented apparatus, method and control.


Feed-Forward Control Module

This is the ideal solution for point-of-use control for flowing systems.


Feed-Back Control Module

This solution set is perfect for batch blending, static or vessel applications.


Standard Control - PID Method

This PID Method is recommended for static applications where the response is determined only by error magnitude and not by other relevant process variables.

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  1. Features

    Controller
    1. Ability to run multiple processes from a single host application
    2. Provides "at-a-glance" troubleshooting on a Windows operating system.
    3. Visual indication of all input⁄output.
    4. Remote "Lights-Out-Fab" control.
    5. Has the ability to change recipes "on-the-fly."
    6. Flowpath Logic

  1. Levels of Control

    Level 1 vs. Level 3 Comparison
    1. Level 1 Controller
      1. Blind Blending (no feedback)
      2. Auto replenish but no analytical confirmation
    2. Level 2 Controller
      1. Blind Blending (no feedback)
      2. Confirmation of solution with inline analytical (QC function)
    3. Level 3 Controller
      1. FractalFillTM (feed back−feed forward control during blending)
      2. CLC (continuous closed loop control)
      3. Auto replenish of analytical confirmed and controlled solutions
      4. Patents Pending

  1. Database & Reporting

    Database Display
    1. Database
      1. Easy to use data collection software.
      2. Data importable for Reporting Tool use.
    2. Reporting Tool
      1. Streamlined workflow with graph-driven analysis.
      2. Drag & Drop analysis; immediate feedback.
      3. Statistical analysis functions such as control limit calculations, mean confidence, internal calculations, etc.
      4. Interactive, flexible & easy to read graphs.
      5. Import & export csv files or generate reports from a database.