1. QC-Cart Features

    qc cart
    1. Configured with up to nine different chemistries without changing the footprint.
    2. Chemical handling is controlled through a user friendly touch screen interface.
    3. Sample lines are coaxial to meet EHS requirements.

  1. Additional Info

    qc cart
    1. Data logging can be accomplished onboard the controller, or any PC compatible laptop can be used to capture the ASCII data string through a DB9 connector, which provides serial communication output.
    2. Small footprint allows for easy storage in fab areas.
    3. Equipped with conductive (static reducing) and chemically resistant wheels.
    4. Onboard air cooler assuring correct input temperature of the chemical sample for the analytical instruments.
    5. Direct sampling from the process tank at temperature.

  1. Facility Requirements

    1. Input signal (tool ready) from host tool or fab automation
    2. 3″ exhaust at 50CFM
    3. Regulated D1 water at 3GPH
    4. Regulated N2 at 20CFH
    5. 110 AC power at 10 amp
    6. Chemical drain (minimum 3/8″)
    7. Dual encapsulation for chemical supply & return